Reverse engineering source polarization error
Published in Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE • Oct 21, 2005
Authors:,,
George E. Bailey
Kostas Adam
Travis Brist
Abstract
With the advent of the first immersion and hyper-NA exposure tools, source polarization quality will become a hot topic. At these oblique incident angles, unintentional source polarization could result in the intensity loss of diffraction orders possibly inducing resolution or process window loss. M...
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