High-resolution pattern replication using soft X rays
Published in Electronics Letters • Feb 24, 1972
Authors:,
D. L. Spears
Henry I. Smith
Abstract
A soft X ray lithographic technique capable of contactless replication of submicrometre linewidth planar-device patterns is described. Special soft X ray exposure masks have been developed for the 4–14 Å wavelength region. Elastic-surface-wave-transducer patterns with 1.3 μm electrode spacings were ...
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