III–V surface processing
Published in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films • Jul 1, 1992
NobleIDNI5P27W61R86S21
Authors:
S. Ingrey
Abstract
The results of exposing cleaved (110) and polished or metal organic chemical vapor deposition (MOCVD) grown (100) single crystal InP and GaAs surfaces to various treatments are reported. The formation of hydrocarbon covered, hydrogen terminated surfaces is shown to provide short term protection agai...
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