"Nanosensor" Based On Diffraction
Published in Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE • Jan 27, 1989
NobleIDNI8P63W08R27S88
Authors:,
Richard J. Tansey
Kenneth C. Widen
Abstract
A "Nanosensor" is conceived and tested in which a 400 nanometer grating and Helium Neon multimode laser are used to resolve nanometer motions of a PZT. A multipass scheme is described which is capable of resolving 1/9 nanometer motions or 1/5695 of the source wavelength.
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