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Observer Development for Automatic STEM Closed-Loop Control

Published in Microscopy and Microanalysis • Jul 1, 2009
NobleIDNI5P74W70R04S90
Authors:
Arturo Tejada
,
Arnold J. den Dekker
,
SW van der Hoeven

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Subject

Observer (physics)
Control theory (sociology)
Closed loop
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