Scheduling for Dedicated Machine Constraint Using Integer Programming
Published • Nov 1, 2008
NobleIDNI6P40W12R08S91
Authors:,,
Huy Pham
Arthur M. D. Shr
Peter P. Chen
Abstract
We propose an integer programming (IP) framework to undertake the dedicated photolithography machine constraint in semiconductor manufacturing. The constraint is one of the new challenges set by the process engineer in semiconductor manufacturing due to natural bias of photolithography machines. Pre...
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