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Scheduling for Dedicated Machine Constraint Using Integer Programming

Published • Nov 1, 2008
NobleIDNI6P40W12R08S91
Authors:
Huy Pham
,
Arthur M. D. Shr
,
Peter P. Chen

Abstract

We propose an integer programming (IP) framework to undertake the dedicated photolithography machine constraint in semiconductor manufacturing. The constraint is one of the new challenges set by the process engineer in semiconductor manufacturing due to natural bias of photolithography machines. Pre...

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