An object-oriented SECS programming environment
Published in IEEE Transactions on Semiconductor Manufacturing • May 1, 1993
NobleIDNI3P17W52R38S81
Authors:
E.J. Wood
Abstract
An object-oriented programming (OOP) environment for developing SEMI Equipment Communication Standard (SECS) applications with the C++ and C programming languages in a Unix workstation environment is described. The system defines a set of programming objects corresponding to the standard SECS-II ite...
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