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Microsensor engineering

Published • Dec 23, 2002
NobleIDNI8P42W95R89S80
Authors:
C. M. Osburn

Abstract

Microsensors are physically small sensors. Although there is no precise definition of what is considered to be small, typically people think of microsensors as those which are made using the microfabrication techniques employed in VLSI and ULSI semiconductor chips. Using the available technologies, ...

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