Исследование изолирующей области планарных сверхпроводниковых YBCO-структур, формируемых методом задающей маски
Published in Физика твердого тела • Jan 1, 2018
NobleIDNI6P84W81R95S75
Authors:,,
Д. В. Мастеров
С. А. Павлов
А. Е. Парафин
Abstract
Abstract —The development of a new “master mask” method for the manufacture of planar structures based on a high-temperature YBCO superconductor is considered. The method involves the creation of a mask on the blank substrate and, upon deposition of YBCO, the superconducting elements are formed in p...
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