Serial Microprocessing
Published • Sep 17, 2010
NobleIDNI7P52W42R53S05
Authors:
Sami Franssila
Abstract
This chapter discusses different breeds of processes: single features are made, slowly and painstakingly, but with great precision. There are two main varieties of serial microprocessing tools: beam based and tip based. Focused ion beams (FIBs), focused electron beams (FEBs) and laser beams are all ...
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