Research indexBook chapter
Technical Note 105/71
Raaijmakers
SPIE eBooks15 Dec 2019
NobleIDark:/48914/w1/20260523/37D336C4DOI10.1117/3.2572060.ch8
Book chapter
Technical Note 105/71
Raaijmakers · SPIE eBooks · 2019 · Subscription
NobleIDark:/48914/w1/20260523/37D336C4DOI10.1117/3.2572060.ch8
PaywalledRead at the publisher
The full text is at the publisher
You can read the abstract here, or open it at the publisher.
Abstract
Herman van Heek and Gijs Bouwhuis create the world’s first wafer stepper. Van Heek is the system architect; Bouwhuis develops the brilliant aligning principle that puts Dutch lithography on the global map in the decades that follow.