Quantitative light-element analysis using parallel EELS
Published in Proceedings annual meeting Electron Microscopy Society of America • Aug 1, 1991
NobleIDNI4P42W00R68S83
Authors:,,
John Hunt
A. J. Strutt
D. B. Williams
Abstract
Electron energy-loss spectrometry (EELS) is theoretically superior to x-ray emission spectrometry (XES) for light element microanalysis. The x-ray fluorescence yield decreases proportional to Z 4 , thus dramatically reducing characteristic x-ray production. However, the ionization cross section incr...
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