NobleBlocks
Public

Process trace analytics for process development

Published • Feb 19, 2021
Authors:
Robert J. Baseman
,
Fateh A. Tipu
,
Sebastian Engelmann

Abstract

Analyses of unit process trace data are critical components of modern semiconductor manufacturing process control. While process development environments share many characteristics with manufacturing environments, development tools and processes may not be suitable candidates for the deployment of t...

Finding related papers...

Discussions

(0)

No comments yet

Be the first to share your thoughts!