利用后通硅烷法优化高速微晶硅薄膜的纵向结构

Research indexJournal article

张, 魏, 赵 and 2 others

Zhongguo kexue. Wulixue Lixue Tianwenxue1 Dec 2010

Journal article

张, 魏, 赵 and 2 others · Zhongguo kexue. Wulixue Lixue Tianwenxue · 2010 · Subscription

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