Anodization Controller
Published in IETE Journal of Research • Jan 1, 1974
NobleIDNI4P54W16R29S10
Authors:,
S. V. Hasabnis
W. J. Jirafe
Abstract
AbstractAn electronic instrument to control anodization of tantalnm thin film used in the fabrication of resistors and capacitors for hybrid microcircuits has been developed.In the case of resistors, tantalum pentoxide layer which is grown on the surface during anodization reduces the resistors trac...
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