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Parallel Algorithm Design and Optimization for Numerical Simulation Application of Ion Implantation in Silicon

Published • Dec 17, 2023
NobleIDNI1P82W13R02S25
Authors:
Ruixuan Qi
,
Wangdong Yang
,
Xiuwen Yan

Abstract

We design a computational framework for ion implantation into silicon that can simulate the reaction process of cascade collisions in silicon and the subsequent annealing process. Since simulating materials requires large-scale particle data and high-precision simulation requirements, which often ta...

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