Patterned_Surface_FlatPattern
Published in contact.engineering • Jun 14, 2024
NobleIDNI9P01W80R19S58
Authors:,,
Arushi Pradhan
Luke Thimons
Nickolay Lavrik
Abstract
Description of sample: • Patterned surface created using E-beam lithography technique. • This digital surface twin contains Flat Pattern Topography was measured using: 1. White Light Interferometer (Bruker Contour GT-I optical profilometer in phase shift interferometry mode) 2. Stylus profilometer (...
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