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Etch simulation code

Published in Figshare • Jan 1, 2019
NobleIDNI6P56W02R91S99
Authors:
Marcell Kiss

Abstract

As supplementary information, we include the MATLAB code to execute the simulations we performed to investigate the crystallographic etch process. The main simulation is the comes first in the file, with supporting functions merged afterwards. The simulated mask geometry needs to supplied for the pr...

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