Surface Modification
Published • Feb 6, 2023
NobleIDNI0P22W84R27S45
Authors:,,
Hans-Jürgen Butt
Karlheinz Graf
Michael Kappl
Abstract
This chapter discusses how solid surfaces can be modified. Surface modification is essential for many applications, for example to reduce or enhance friction, wear, or adhesion, to make implants biocompatible, to coat sensors, or in microfabrication. In physical vapor deposition, films are deposited...
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