Pattern generation system
Published • Aug 26, 1988
Authors:,,
ALLEN PAUL C
TEITZEL ROBIN
THOMAS TIMOTHY
Abstract
An improved pattern generation system. The pattern generation system of the present invention discloses an improved optical system for correcting problems of astigmatism and ellipticity in a radiant energy beam used for generating patterns on a workpiece. The present invention further discloses impr...
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