Closed-loop MOEMS accelerometer
Published in Optics Express • May 23, 2022
NobleIDNI4P30W52R40S14
Authors:,,
Majid Taghavi
Abolfazl Abedi
Gholam-Mohammad Parsanasab
Abstract
In this paper, a closed-loop micro-opto-electro-mechanical system (MOEMS) accelerometer based on the Fabry-Pérot (FP) interferometer is presented. The FP cavity is formed between the end of a cleaved single-mode optical fiber and the cross-section of a proof mass (PM) which is suspended by four U-sh...
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