Ion-Solid Interactions
Published • Mar 28, 1996
NobleIDNI3P73W83R10S86
Authors:,,
Michael Nastasi
James Mayer
James K. Hirvonen
Abstract
Modern technology depends on materials with precisely controlled properties. Ion beams are a favoured method to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are ion implantation systems. In addition to integrated...
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