Decrease in Ozone Density of Atmospheric Surface-Discharge Plasma Source
Published in Japanese Journal of Applied Physics • Aug 1, 2012
Authors:,,
Hiroyuki Kobayashi
Takumi Tandou
Hideyuki Nagaishi
Abstract
A surface-discharge plasma source based on dielectric barrier discharge (DBD) has been developed for use in sterilization and cleaning. In these processes, ozone-generation ability is one of the key factors in regard to atmospheric plasma sources. However, it was observed that ozone density decrease...
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