SOFT LITHOGRAPHY
Published in Annual Review of Materials Science • Aug 1, 1998
Authors:,
Younan Xia
George M. Whitesides
Abstract
Abstract Soft lithography represents a non-photolithographic strategy based on self-assembly and replica molding for carrying out micro- and nanofabrication. It provides a convenient, effective, and low-cost method for the formation and manufacturing of micro- and nanostructures. In soft lithography...
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