超!大!発想による!地球温暖化と世界金融危機の対策 「一石百鳥」のアイデア提案

Chromium aluminum oxide was chosen as a new candidate for use as an attenuated phase-shifting mask (Att-PSM) material. The compositions of films were correlated with optical properties. With the measured and the fitted data, we simulated the transmittance and the phase shift using the matrix method.... View More