Improved scatterometry time-to-solution using virtual reference
Published in Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE • Mar 19, 2015
NobleIDNI7P75W47R16S11
Authors:,,
Alok Vaid
Givantha Iddawela
Jamie Tsai
Abstract
Advanced nodes require precise detection and control of intricate profile details – scatterometry is tool of choice for such requirements. Scatterometry is a model-based technique, and needs extensive reference metrology for qualification. Such reference measurements are costly, time-consuming and o...
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