Impact of platinum incorporation on thermal stability and interface resistance in NiSi/Si junctions based on first-principles calculation

Marukame, Takao; Yamauchi, Takashi; Nishi, Yoshifumi; Sasaki, T.; Kinoshita, A.; Koga, J.; Kato, Koichi

doi:10.1109/iedm.2008.4796747

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Impact of platinum incorporation on thermal stability and interface resistance in NiSi/Si junctions based on first-principles calculation

Shared by NobleBlocks on Dec 1, 2008 • 12:00 AM UTC

Authors:

Takao Marukame

Takashi Yamauchi

Yoshifumi Nishi

Abstract

We studied extremely low interface resistance and thermal stability of the interface of NiSi/Si junctions with Pt (Ni(Pt)Si/Si junctions) based on first-principles calculation. The physical origin of thermal stability of NiSi enhanced by Pt is clarified by the calculations. Our calculations show cle...

Subject

Materials science

Thermal stability

Schottky barrier

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