Atom probe microscopy of three-dimensional distribution of silicon isotopes in Si28∕Si30 isotope superlattices with sub-nanometer spatial resolution

Shimizu, Yasuo; Kawamura, Yōko; Uematsu, Masashi; M. Itoh, Kohei; Tomita, Mitsuhiro; Sasaki, Mikio; Uchida, Hiroshi; Takahashi, Mamoru

doi:10.1063/1.3236673

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Atom probe microscopy of three-dimensional distribution of silicon isotopes in Si28∕Si30 isotope superlattices with sub-nanometer spatial resolution

Shared by NobleBlocks on Oct 1, 2009 • 12:00 AM UTC

Authors:

Yasuo Shimizu

Yōko Kawamura

Masashi Uematsu

Abstract

Laser-assisted atom probe microscopy of 2 nm period Si28∕Si30 isotope superlattices (SLs) is reported. Three-dimensional distributions of Si28 and Si30 stable isotopes are obtained with sub-nanometer spatial resolution. The depth resolution of the present atom probe analysis is much higher than that...

Subject

Atom probe

Isotope

Resolution (logic)

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