Generation of a high-density highly non-equilibrium air plasma for high-speed large-area flat surface processing

A new plasma source, the so-called diffuse coplanar surface barrier discharge (DCSBD), is described. DCSBD allows a visually diffuse high-density 'cold' plasma to be sustained in atmospheric-pressure air at a high plasma power density exceeding 100 W cm−3 that permits high-speed surface processing o... View More