Improved quantification in secondary-ion mass spectrometry detecting MCs+ molecular ions

Gnaser, Hubert

doi:10.1116/1.579262

Public

Improved quantification in secondary-ion mass spectrometry detecting MCs+ molecular ions

Published in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films • Mar 1, 1994

Authors:

Hubert Gnaser

Abstract

Molecular secondary ions composed of a sample atom M and a resputtered Cs+ projectile (MCs+) are successfully used for the quantification of secondary-ion mass spectrometry (SIMS) data. For a variety of different specimens it is demonstrated that the yields of these rather ubiquitous species exhibit...

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Secondary ion mass spectrometry

Ion

Analytical Chemistry (journal)

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