Origin of Dielectric Relaxation Observed for Ba0.5Sr0.5TiO3 Thin-Film Capacitor

Fukuda, Yukio; Numata, Ken; Aoki Katsuhiro Aoki, Katsuhiro; Nishimura Akitoshi Nishimura, Akitoshi

doi:10.1143/jjap.35.5178

Public

Origin of Dielectric Relaxation Observed for Ba0.5Sr0.5TiO3 Thin-Film Capacitor

Shared by NobleBlocks on Sep 1, 1996 • 12:00 AM UTC

Authors:

Yukio Fukuda

Ken Numata

Katsuhiro Aoki Katsuhiro Aoki

Abstract

In order to identify the origin of dielectric relaxation of Pt/Ba1-xSrxTiO3/Pt thin-film capacitors, effects of post-annealing in oxygen ambient on their electrical properties were investigated. From comparison of the electrical properties of as-deposited and post-annealed capacitors, it is conclude...

Subject

Capacitor

Dielectric

Annealing (glass)

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