Large dielectric constant (ε/ε&amp;gt;6000) Ba0.4Sr0.6TiO3 thin films for high-performance microwave phase shifters

M. Carlson, C.; Rivkin, T.; A. Parilla, P.; D. Perkins, John; S. Ginley, David; B. Kozyrev, A.; N. Oshadchy, V.; S. Pavlov, A.

doi:10.1063/1.126212

Public

Large dielectric constant (ε/ε&gt;6000) Ba0.4Sr0.6TiO3 thin films for high-performance microwave phase shifters

Shared by NobleBlocks on Apr 3, 2000 • 12:00 AM UTC

Authors:

C. M. Carlson

T. Rivkin

P. A. Parilla

Abstract

We deposited epitaxial Ba0.4Sr0.6TiO3 (BST) films via laser ablation on MgO and LaAlO3 (LAO) substrates for tunable microwave devices. Postdeposition anneals (∼1100 °C in O2) improved the morphology and overall dielectric properties of films on both substrates, but shifted the temperature of maximum...

Subject

Dielectric

Materials science

Figure of merit

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