New thermoelectric components using microsystem technologies

Böttner, H.; Nurnus, J.; Gavrikov, Alexander; Kühner, Gerd; Jägle, Martin; Kunzel, C.; Eberhard, D.; Plescher, G.; Schubert, Axel; Schlereth, K.-H.

doi:10.1109/jmems.2004.828740

Public

New thermoelectric components using microsystem technologies

Shared by NobleBlocks on Jun 1, 2004 • 12:00 AM UTC

Authors:

H. Böttner

J. Nurnus

Alexander Gavrikov

Abstract

This work describes the first thermoelectric devices based on the V-VI-compounds Bi/sub 2/Te/sub 3/ and (Bi,Sb)/sub 2/Te/sub 3/ which can be manufactured by means of regular thin film technology in combination with microsystem technology. Fabrication concept, material deposition for some 10-μm-thick...

Subject

Thermoelectric effect

Microsystem

Materials science

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