甚高頻電容式耦合矽烷/氫氣電漿模擬研究 —電漿物理化學機制與操作參數關聯性之分析探討

In the recent years, micro crystal silicon thin film is more popular on thin film solar cell. Because higher plasma density and lower ion energy, the frequency of PECVD is turning from RF region to VHF region. The goal of our study is to build a VHF-PECVD model and to find out how the plasma behavio... View More