Thin Films of Molybdenum Disulfide Doped with Chromium by Aerosol-Assisted Chemical Vapor Deposition (AACVD)

J. Lewis, David; A. Tedstone, Aleksander; Zhong, Xiangli; A. Lewis, Edward; P. Rooney, Aidan; Savjani, Nicky; R. Brent, Jack; J. Haigh, Sarah; Burke, M.G.; Muryn, C.A.; Raftery, James; P. Warrens, Chris; R. West, Kevin; Gaemers, Sander; O’Brien, Paul

doi:10.1021/cm504532w

Public

Thin Films of Molybdenum Disulfide Doped with Chromium by Aerosol-Assisted Chemical Vapor Deposition (AACVD)

Shared by NobleBlocks on Jan 31, 2015 • 12:00 AM UTC

Authors:

David J. Lewis

Aleksander A. Tedstone

Xiangli Zhong

Abstract

A combined single-source precursor approach has been developed for the deposition of thin films of Cr-doped molybdenum disulfide (MoS2) by aerosol-assisted chemical vapor deposition (AACVD). Tris(diethyldithiocarbamato)chromium(III) can also be used for the deposition of chromium sulfide (CrS). Film...

Subject

Materials science

Chemical vapor deposition

Scanning electron microscope

Finding related papers...

Discussions

(0)

No comments yet

Be the first to share your thoughts!