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Создание пористых слоев германия имплантацией ионами серебра

Published in Письма в журнал технической физики • Jan 1, 2018
NobleIDNI7P12W24R45S05
Authors:
А.Л. Степанов
,
В.В. Воробьев
,
В.И. Нуждин

Abstract

AbstractWe propose a method for the formation of porous germanium ( P -Ge) layers containing silver nanoparticles by means of high-dose implantation of low-energy Ag^+ ions into single-crystalline germanium ( c -Ge). This is demonstrated by implantation of 30-keV Ag^+ ions into a polished c -Ge plat...

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