Влияние концентрации кислорода в составе газовой плазмообразующей смеси на оптические и структурные свойства пленок нитрида алюминия

AbstractIn the work we investigate synthesis of aluminum nitride films using reactive ion plasma deposition in oxygen/nitrogen gas mixture for application as optical elements for power semiconductor lasers. The experimental refractive index of synthesized AlNO films is dependent on oxygen compositio... View More