Форма распределения интенсивности рентгеновской дифракции в обратном пространстве и ее связь с дислокационной структурой эпитаксиальных слоев

AbstractX-ray diffraction (XRD) in asymmetric Bragg geometry was measured and XRD intensity distribution maps in the reciprocal space were constructed for GaN epitaxial layers with various degrees of structural perfection grown on c -sapphire substrates. It is established that equal-intensity lines ... View More