Achieving High Mobility in IGTO Thin-Film Transistors at a Low Temperature via Film Densification

The effects of chamber pressure ( <i xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">P</i> <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">C</sub> ) on the structural and chemical properties of an indium gallium... View More