Анализ структуры многослойных нанокристаллических покрытий на основе параметров массопереноса плазмы, вычисленных методом Монте-Карло
Published in Письма в журнал технической физики • Jan 1, 2019
NobleIDNI4P38W58R81S40
Authors:,,
А. В. Черногор
И. В. Блинков
Д.С. Белов
Abstract
AbstractThe results of the simulation of plasma fluxes onto the surface of rotating substrates during the combustion of a vacuum arc of the Cr–Ti–Mo cathode system are presented. The structure and composition of the arc-PVD Ti_0.15Cr_0.74Mo_0.11N_0.84 coatings are experimentally studied. The numeric...
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