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Поверхностные поляритоны в пленках нитридов алюминия и галлия, легированных кремнием

Published in Журнал технической физики • Jan 1, 2019
NobleIDNI3P95W25R76S41
Authors:
Н.Н. Новикова
,
В.А. Яковлев
,
С.А. Климин

Abstract

AbstractThe reflection and attenuated total reflection spectra of aluminum and gallium nitride films doped with silicon on sapphire substrates with a buffer layer of aluminum nitride have been measured. In the spectra of attenuated total reflection, surface phonon and plasmon–phonon polaritons were ...

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