Особенности механизма диффузии в структуре алюминий-кремний при облучении ее поверхности внеэлектродной плазмой высоковольтного газового разряда

Features of the diffusion mechanism in Al-Si structure when its surface is irradiated by off-electrode plasma of high-voltage gas discharge at discharge current I=50 mA, accelerating voltage U=4 kV and radiation durations 90 s < t ≤ 600 s are investigated. Model for calculating the concentration pro... View More