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Деформация тонких пленок полуметаллов методом купольного изгиба подложки

Published in Физика и техника полупроводников • Nov 22, 2021
NobleIDNI8P56W25R34S41
Authors:
А.В. Суслов
,
В.А. Герега
,
В.М. Грабов

Abstract

The results of a study of the semimetal films deformation produced by dome bending of the substrate are presented. Deformation control was carried out by means of X-ray diffraction analysis. It is shown that the dome bending method can be used to study films under planar deformation in a film-substr...

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