Quantification of the sp3 content in Diamond-Like carbon Films: Effects of Ne plasma addition in Deep Oscillation Magnetron sputtering

Oliveira, J.C.; Vahidi, Alireza; Ferreira, Fábio; Serra, R.; Cavaleiro, A.

doi:10.1016/j.apsusc.2024.160565

Public

Quantification of the sp3 content in Diamond-Like carbon Films: Effects of Ne plasma addition in Deep Oscillation Magnetron sputtering

Published in Applied Surface Science • Jun 19, 2024

Authors:

J.C. Oliveira

Alireza Vahidi

Fábio Ferreira

Abstract

Diamond-like carbon (DLC) films are a class of amorphous carbon materials with unique properties, including high hardness and wear resistance, making them attractive for aerospace and automotive applications. Recently, High Power Impulse Magnetron Sputtering (HiPIMS) has emerged as a new route for m...

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Open Access

Subject

Sputter deposition

Plasma

Materials science

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