スパイラルアンテナを用いた誘導結合型プラズマ生成における電子の熱運動効果

The effect of the electron thermal motion on inductively coupled plasma (ICP) production by the use of a planar, spiral antenna was investigated experimentally. Results were compared to the calculated ones by the non-local model based on the electron motion. Both of the measured skin depth of the ev... View More